How Thermal Mass Changes the Behavior of a Wafer Heater

https://silicone-heating-insights.silverstonebrief.com/posts/pi-heater-buying-guide-for-equipment-manufacturers

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result